ETC Plasma Trap Superior Scrubber Performance for:

PECVD and LPCVD Nitride, TEOS and PSG / BPSG

PECVD -Si , SiC and LPCVD Poly Si

LPCVD W adn W Silicide

MOVCD and LPCVD GaAS

MOCVD Al. and MOCVD Cu

PH3 Annealing

PFC Abatement