N2-Shield components are applied in the atmospheric chemical vapor deposition equipments. The N2-Shield which GTI spplied is designed with all-in-one concept. There has no screw within the assembly and this way can extends the lifetime of N2 shield itself and elongate the maintenance period to improve the system utilization . The mesh portion of N2 shield assembly made by special fabrication method and the mesh size is consistent to ensure excellent uniformity and deposition rate. This product had been certified by many customers. The connections for all parts had enhanced welding and the side shielding will not tear out during HF cleaning with multiple-layer manufacture production and cleaning processes.
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